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Image Search Results
Journal: Micromachines
Article Title: Evaluation and Optimization of a MOEMS Active Focusing Device
doi: 10.3390/mi12020172
Figure Lengend Snippet: The large effect of Al stress can be compensated by deposition of an Al-layer with exactly the same stress values and thickness on the back side. In this case, the low membrane distortion without an aluminum reflective layer is recovered, i.e., the membrane part is almost flat.
Article Snippet: The
Techniques: Membrane